Microelectronic Failure Analysis Techniques

Microelectronic Failure Analysis Techniques

Microelectronic Failure Analysis Desk Reference

Developed by the Electronic Device Failure Analysis Society (EDFAS) Publications Committee.

Microelectronics Failure Analysis Techniques

The objective of this procedural guide was not to present an expose of device failure modes/mechanisms and applicable techniques for detection, identification and measurement but rather to provide a treatise on proven failure analysis techniques, equipment, procedures and expected analytical results. The guide thus represents a compilation and description of practical semiconductor failure analysis techniques rather than failure analysis flow sequences for verifying specific device failure mechanisms. (Author).